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Petersen
Advanced Lithography offers a variety of
products and services to meet Advanced Lithographic Imaging challenges.
- EMF3 – Large field,
full Maxwell equation solver.
- Lithography Consulting – through
a variety of services such as Lithography Courses, OPC Design and Testing,
Contract Research or Custom Mask Design.
- Litho Toolbox – a variety
of products developed by PAL (Image Contrast Reticle – GaAs Mask – SCAA Mask
– Weak Illuminators)
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