Petersen
Advanced Lithography offers a
variety of
products and services to meet Advanced Lithographic Imaging challenges.
- EMF3 – Large field, full Maxwell
equation solver.
- Lithography Consulting – through a variety of services
such as Lithography Courses, OPC Design and Testing, Contract Research
or Custom Mask Design.
- Litho Toolbox – a variety of products developed
by PAL (Image Contrast Reticle – GaAs Mask – SCAA
Mask – Weak Illuminators)